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Aluminium nitride ceramic substrate
Aluminium nitride ceramic substrate is featured by high thermal conductivity, high electric insulation, low dielectric and low thermal expansion. In particular, its thermal conductivity is about ten times of aluminium oxide ceramic substrate; the thermal expansion is equivalent to that of silicon chip, and it is the most ideal substitute product of toxic beryllium oxide.
It includes four modules.
1、Thin film substrate
2、Thick film substrate